The Government of The Netherlands published a Ministerial Decree containing new rules restricting the exportation of certain Advanced Semiconductor Manufacturing Equipment, which will go into effect on September 1st 2023.
These new rules introduce export controls for certain commodities used in the production of semiconductors not already covered by the Dual Use regulation of the European Union.
Details, along with the Export Control Classification Numbers (ECCNs) can be found in the list below.
Export authorizations can be granted by Director-General of the Customs Administration of the Netherlands, subject to conditions.
The main reason for restricting the exportation of these commodities is that the semiconductors that can be produced with such equipment "can make a crucial contribution to certain advanced military applications and can be used to develop high-end military (weapon) systems and weapons of mass destruction".
- EUV pellicles (3B001.l)
- Production equipment for EUV pellicles (3B001.m)
- Lithography equipment being align and expose step and repeat (direct step on wafer) or step and scan (scanner) equipment for wafer processing using photo-optical or X-ray methods, meeting the provided technical specifications (3B001.f.4)
- Equipment for atomic layer deposition (ALD) of work function metals, meeting the provided technical specifications (3B001.d.12)
- Equipment designed for epitaxial growth of silicon (Si), carbon doped silicon, silicon-germanium (SiGe) or carbon doped SiGe, meeting the provided technical specifications (3B001.a.4)
- Equipment designed for the enhanced deposition of a layer of low-k dielectric through void-free plasma, meeting the provided technical specifications (3B001.d.19)
- Software specially designed for the development, production or use of the equipment in any of the ECCNs above (3D007)
- Technology that is necessary for the development, production or use of equipment in any of the ECCNs above (3E005)
The source in Dutch is here.